Ultra-high resolution zone plates
Description
- Ultra-high aspect ratio Fresnel zone plates
- World-record achievable resolution
- Based on the Ir-line-doubling technique
- Material: Ir
Example
FIB cross-section of 25 nm wide, 550 nm high Ir
World-record resolution: 7nm
Specifications
∆Rn [nm]
typical
25 - 50
limit
< 10
D [µm]
typical
100 - 250
limit
> 2.500
N
typical
1.000 - 3.000
limit
> 30.000
Aspect Ratio
typical
20
limit
> 30
Publications
B. Rösner et al. Exploiting atomic layer deposition for fabricating sub-10 nm X-ray lenses Microelectronic Engineering 191 (2018) p. 91
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B. Rösner et al. 7 nm spatial resolution in soft x-ray microscopy Microscopy and Microanalysis 24 (2018) p. 270
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K. Jefimovs et al. A zone doubling technique to produce ultra-high resolution x-ray optics Physical Review Letters 99 (2007) p. 264801
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J. Vila-Comamala et al. Advanced Thin Film Technology for Ultrahigh Resolution X-Ray Microscopy Ultramicroscopy 109 (2009) p. 1360